This book describes LSI process technology and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies-the longstanding technology driver of Si ULSI-as they advance from the 1 Kbit to the Gbit DRAM era. |Mega-Bit Memory Technology - From Mega-Bit to Giga-Bit From Mega-Bit to Giga-Bit | Civil Engineering